A Detector for Fast Electron Current Measurements based on Silicon Drift Detector Technology
نویسندگان
چکیده
منابع مشابه
A Detector for Fast Electron Current Measurements based on Silicon Drift Detector Technology
Solid state detectors for electron current measurements are a well-established tool in electron microscopy, especially for the detection of backscattered electrons (BSE) underneath the pole piece inside a SEM or for the measurement of transmitted electrons in STEM or TEM applications. The progress in electron microscopy over the last years has led to many interesting new applications but also t...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2014
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761400186x